24 July 2002 Processing techniques for novel BARC chemistries
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Abstract
Previous generations of Bottom Anti-Reflective Coatings (BARCs) have had excellent optical properties but the etch performance for these BARC's were only 30% faster than the photoresist at best. A novel BARC chemistry has increased the capability of the photolithography process; this new chemistry has the capability to change etch and optical properties by the BARC bake process. This paper will present the bake process changes required to modify both etch characteristics and optical properties. Etch characteristics that were measured were bulk etch rate and etch selectivity to photoresist. Index of refraction and the absorption coefficients were measured for optical properties. Photolithography results focusing on Acetal and Hybrid photoresist types will be presented with specific attention to critical dimension control and focus latitude shifts, if any, associated with these BARC bake process changes.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nickolas L. Brakensiek, Chris Cox, Rama Puligadda, "Processing techniques for novel BARC chemistries", Proc. SPIE 4690, Advances in Resist Technology and Processing XIX, (24 July 2002); doi: 10.1117/12.474180; https://doi.org/10.1117/12.474180
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