30 July 2002 CD uniformity improvement by active scanner corrections
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As resolution shrinks, also the demands for litho CD Uniformity are becoming tighter. In replicating the mask pattern into photoresist, a sequence of modules within the patterning cluster (coat, expose, develop, etch) is responsible for CD non-uniformity. So far, the strategy has been to make the contribution of each of these modules as small as possible. The CD Uniformity can be improved in a more efficient way by compensating the various error sources with adapted dose profiles on the scanner. An inventory is made of the requirements for this compensation mechanism. In more detail a description is given how the scanner can apply these dose corrections. With experiments, the feasibility of the concept is proven. Improvements in CD Uniformity over 5nm are demonstrated, both on test structures as well as on real device layers.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan B.P. van Schoot, Jan B.P. van Schoot, Oscar Noordman, Oscar Noordman, Peter Vanoppen, Peter Vanoppen, Frans Blok, Frans Blok, Donggyu Yim, Donggyu Yim, Chan-Ha Park, Chan-Ha Park, Byeong-Ho Cho, Byeong-Ho Cho, Thomas Theeuwes, Thomas Theeuwes, Young-Hong Min, Young-Hong Min, } "CD uniformity improvement by active scanner corrections", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); doi: 10.1117/12.474579; https://doi.org/10.1117/12.474579

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