30 July 2002 Long-term laser durability testing of optical coatings and thin films for 157-nm lithography
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Abstract
Long-term durability tests of optical thin films and thin films designed for attenuating phase shifters have been performed in a chamber, which stresses clean protocols to eliminate extraneous effects of surface contamination. Most anti-reflective coatings tend to degrade several percent in transmission within 1 MJ/cm2 total dose. Attenuating phase shifting materials usually show an increase in transmission during 6 kJ/cm2. In both types of films there are exceptions, indicating that there are no fundamental causes that would limit the performance of such films. A new phenomenon of laser-induced surface damage in calcium fluoride has been observed, and is being studied.
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Vladimir Liberman, Vladimir Liberman, Mordechai Rothschild, Mordechai Rothschild, Stephen T. Palmacci, Stephen T. Palmacci, N. N. Efremow, N. N. Efremow, Jan H. C. Sedlacek, Jan H. C. Sedlacek, A. Grenville, A. Grenville, } "Long-term laser durability testing of optical coatings and thin films for 157-nm lithography", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); doi: 10.1117/12.474552; https://doi.org/10.1117/12.474552
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