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12 July 2002 Evolution and integration of optimal IC design: performance and manufacturing issues
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Abstract
A perspective is presented on how the semiconductor integrated circuit industry has evolved and what we can expect over the next decade or two. However, this 'forecast' is given in only the broadest sense, to make it relatively independent on innovations and discoveries that are likely to strongly shape the industry over this time period. Rather, trends are examined, as well as general 'tools' that will undoubtedly be important in advancing from our present microelectronics era to our presumable future in nanoelectronics.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel C. Cole, So-Yeon Baek, and Xima Zhang "Evolution and integration of optimal IC design: performance and manufacturing issues", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); https://doi.org/10.1117/12.475683
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