12 July 2002 Isolating causes of yield excursions with decision tress and commonality
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The use of Decision Trees to analyze data is discussed as an approach to solving problems of Yield excursions in semiconductor manufacturing. The relation to equipment commonality is discussed along with some of the pitfalls of incautious use of general probability estimates. The paper introduces a Mixing Diagram to help visualize commonality issues, it introduces work around methods for resolving ambiguities in the commonality, it reviews Decision Trees algorithms, and it ends with a discussion of current limitations of the method along with recommendations for future research.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter Waksman, Peter Waksman, } "Isolating causes of yield excursions with decision tress and commonality", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); doi: 10.1117/12.475647; https://doi.org/10.1117/12.475647


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