Model-based WYSIWYG: dimensional metrology infrastructure for design and integration

Alexander Starikov

doi:10.1117/12.475668

12 July 2002 Model-based WYSIWYG: dimensional metrology infrastructure for design and integration

Alexander Starikov

Proceedings Volume 4692, Design, Process Integration, and Characterization for Microelectronics; (2002) https://doi.org/10.1117/12.475668
Event: Design, Process Integration, and Characterization for Microelectronics, 2002, Santa Clara, CA, United States

Abstract

The purpose of this paper is to name and discuss some of the most basic issues in today's optical microlithography and to promote consensuses building, helping with the emergence of a superior model-based WYSIWYG patterning paradigm.

Citation Download Citation

Alexander Starikov "Model-based WYSIWYG: dimensional metrology infrastructure for design and integration", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); https://doi.org/10.1117/12.475668

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