12 July 2002 Prediction of light scattering from particles on a filmed surface using discrete-dipole approximation
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Abstract
Numerical calculation of angle-resolved light scattering characteristics of features with arbitrary shape, such as particle contaminations and surface defects, on a filmed surface is very useful to the development and calibration of wafer inspection tools. A model and associated code based on the discrete-dipole approximation used to compute the light scattering form a particle on a filmed surface is developed. The reflection interaction matrix is modified with the Sommerfeld integrals for filmed surfaces. 3D fast Fourier transform method is used for accelerating the computation. Model predicted scattering signatures for a 0.305 micrometers polystyrene latex sphere on a smooth thin layer of silicon dioxide film on silicon substrate are compared with experimental results. The incident beam has a wavelength of 632.8 nm and the incident angle is 70 degree. The comparison shows very good agreement between the modeling results and experimental results. The model is also checked with another numerical mode,, which further shows the validity of the model.
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Haiping Zhang, Haiping Zhang, E. Dan Hirleman, E. Dan Hirleman, } "Prediction of light scattering from particles on a filmed surface using discrete-dipole approximation", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); doi: 10.1117/12.475698; https://doi.org/10.1117/12.475698
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