Active piezoelectric diaphragms

Robert G. Bryant; Robert T. Effinger IV; Isaiah Aranda Jr.; Ben M. Copeland Jr.; Ed W. Covington III

doi:10.1117/12.474988

11 July 2002 Active piezoelectric diaphragms

Robert G. Bryant, Robert T. Effinger IV, Isaiah Aranda Jr., Ben M. Copeland Jr., Ed W. Covington III

Proceedings Volume 4699, Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics; (2002) https://doi.org/10.1117/12.474988
Event: SPIE's 9th Annual International Symposium on Smart Structures and Materials, 2002, San Diego, California, United States

Abstract

Several active piezoelectric diaphragms were fabricated by placing unelectroded piezoelectric disks between copper clad films patterned with Inter-Circulating Electrodes (ICE). When a voltage potential is applied to the electrodes, the result is radially distributed electric field that mechanically strains the piezo-ceramic along the Z-axis, rather than the expected in-plane direction. Unlike other out of plane piezoelectric actuators, which are benders, these Radial Field Diaphragms strain concentrically yet afford high displacements while maintaining a constant circumference. This paper covers the fabrication and characterization of these diaphragms as a function of poling field strength, ceramic diameter and line spacing, as well as the surface topography, the resulting strain field and displacement as a function of applied voltage ranging from DC to 10 Hz.

Citation Download Citation

Robert G. Bryant, Robert T. Effinger IV, Isaiah Aranda Jr., Ben M. Copeland Jr., and Ed W. Covington III "Active piezoelectric diaphragms", Proc. SPIE 4699, Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics, (11 July 2002); https://doi.org/10.1117/12.474988

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available