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11 July 2002 Active piezoelectric diaphragms
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Abstract
Several active piezoelectric diaphragms were fabricated by placing unelectroded piezoelectric disks between copper clad films patterned with Inter-Circulating Electrodes (ICE). When a voltage potential is applied to the electrodes, the result is radially distributed electric field that mechanically strains the piezo-ceramic along the Z-axis, rather than the expected in-plane direction. Unlike other out of plane piezoelectric actuators, which are benders, these Radial Field Diaphragms strain concentrically yet afford high displacements while maintaining a constant circumference. This paper covers the fabrication and characterization of these diaphragms as a function of poling field strength, ceramic diameter and line spacing, as well as the surface topography, the resulting strain field and displacement as a function of applied voltage ranging from DC to 10 Hz.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert G. Bryant, Robert T. Effinger IV, Isaiah Aranda Jr., Ben M. Copeland Jr., and Ed W. Covington III "Active piezoelectric diaphragms", Proc. SPIE 4699, Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics, (11 July 2002); https://doi.org/10.1117/12.474988
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