Integration, electrical, and electromechanical properties of PZT and PMN-PT thin films for MEMS applications

Carsten Kuegeler; Marcus Hoffmann; Ulrich Boettger; Rainer Waser

doi:10.1117/12.474966

11 July 2002 Integration, electrical, and electromechanical properties of PZT and PMN-PT thin films for MEMS applications

Carsten Kuegeler, Marcus Hoffmann, Ulrich Boettger, Rainer Waser

Author Affiliations +

Proceedings Volume 4699, Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics; (2002) https://doi.org/10.1117/12.474966
Event: SPIE's 9th Annual International Symposium on Smart Structures and Materials, 2002, San Diego, California, United States

Abstract

Piezoelectric and electrostrictive thin films are potential candidates for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions, e.g. in micro mirrors and micro relays. Within this context the paper reports on the preparation and the integration processes of chemical solution deposited (CSD) PZT and PMN-PT thin films in combination with silicon bulk micro machining technique. The operativeness of the processes is demonstrated by the development of an integrated micro actuator for a micro switch application. Furthermore, the work deals also with the characterization of the integrated materials. For fabrication control and electrical characterizations microscopy, SEM, hysteresis- and CV-, and degradation measurements were performed. Laser interferometry and resonance frequency measurements were used to characterize the electromechanical performance of both materials in comparison to the behavior of the developed micro actuator.

Citation Download Citation

Carsten Kuegeler, Marcus Hoffmann, Ulrich Boettger, and Rainer Waser "Integration, electrical, and electromechanical properties of PZT and PMN-PT thin films for MEMS applications", Proc. SPIE 4699, Smart Structures and Materials 2002: Active Materials: Behavior and Mechanics, (11 July 2002); https://doi.org/10.1117/12.474966

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