Carbon and ceramic microcoils for MEMS by microwave CVD

Jining Xie; Chiauling Ong; Vijay K. Varadan

doi:10.1117/12.475031

11 July 2002 Carbon and ceramic microcoils for MEMS by microwave CVD

Jining Xie, Chiauling Ong, Vijay K. Varadan

Proceedings Volume 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology; (2002) https://doi.org/10.1117/12.475031
Event: SPIE's 9th Annual International Symposium on Smart Structures and Materials, 2002, San Diego, California, United States

Abstract

In this paper, synthesis of carbon and ceramic microcoils by microwave chemical vapor deposition method is presented. Carbon microcoils were synthesized over nickel catalyst using acetylene as carbon source by microwave technique. Titanium carbide microcoils were gained by direct titanization to carbon microcoils .A comparison is given between conventional thermal filament CVD and microwave CVD methods. Particular attention is given to the potential applications of carbon and ceramic microcoils for MEMS.

Citation Download Citation

Jining Xie, Chiauling Ong, and Vijay K. Varadan "Carbon and ceramic microcoils for MEMS by microwave CVD", Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); https://doi.org/10.1117/12.475031

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