11 July 2002 Design concept and preliminary experimental demonstration of MEMS gyroscopes with 4-DOF master-slave architecture
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Abstract
This paper reports a design concept for MEMS gyroscopes that shifts the complexity of the design from control architecture to system dynamics, utilizing the passive disturbance rejection capability of the 4-DOF dynamical system. Specifically, a novel wide-bandwidth micromachined gyroscope design approach based on increasing the degrees-of-freedom of the oscillatory system by the use of two independently oscillating interconnected proof masses is presented along with preliminary experimental demonstration of implementation feasibility. With the concept of using a 4-DOF system, inherent disturbance rejection is achieved due to the wide operation frequency range of the dynamic system, providing reduced sensitivity to structural and thermal parameter fluctuations. Thus, less demanding active control strategies are required for operation under presence of perturbations. The fabricated prototype dual-mass gyroscopes successfully demonstrated a dramatically wide driving frequency range within where the drive direction oscillation amplitude varies insignificantly without any active control, in contrast to the conventional gyroscopes where the mass has to be sustained in constant amplitude oscillation in a very narrow frequency band. Mechanical amplification of driven mass oscillation by the sensing element was also experimentally demonstrated, providing large oscillation amplitudes, which is crucial for sensor performance.
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Cenk Acar, Cenk Acar, Andrei M. Shkel, Andrei M. Shkel, } "Design concept and preliminary experimental demonstration of MEMS gyroscopes with 4-DOF master-slave architecture", Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); doi: 10.1117/12.475019; https://doi.org/10.1117/12.475019
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