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11 July 2002 Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers
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Abstract
We report on the performance of micromachined unimorph actuators (PMAT) based on the electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymer. Because of the high electrostrictive strain and high elastic energy density of the active polymer, the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range. The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.
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Tian-Bing Xu, Zhong-Yang Cheng, and Qi Ming Zhang "Evaluation of micromachined actuators based on electrostrictive P(VDF-TrFE) polymers", Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); https://doi.org/10.1117/12.475043
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