15 July 2002 Development of a new standing wave type ultrasonic linear motor
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Abstract
This paper presents a new standing wave type linear motor that can move bi-directionally with identical performance in both the forward and backward directions. The motor consists of a metallic stator and two piezoceramic plates bonded to the stator with the spatial phase difference of a half wavelength. With two electric driving signals either in-phase or out-of-phase for the two piezoceramic plates, the piezoceramic plates excite two ultrasonic standing waves with a certain phase difference. They generate a new standing wave when combined. The operation principle of the motor is verified through finite element analyses. For an experimental illustration of the theoretical and numerical results, a sample motor is fabricated and characterized following the numerical design. The experimental results confirm the validity and practical applicability of the new motor structure.
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Yongrae R. Roh, Yongrae R. Roh, Jaewha Kwon, Jaewha Kwon, Soosun Lee, Soosun Lee, } "Development of a new standing wave type ultrasonic linear motor", Proc. SPIE 4701, Smart Structures and Materials 2002: Smart Structures and Integrated Systems, (15 July 2002); doi: 10.1117/12.474670; https://doi.org/10.1117/12.474670
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