Paper
7 June 2002 Nondestructive evaluation of bonding characteristics of TiO2-Al2O3 gas sensor
Bin Feng, Golam Newaz, Gregory W. Auner, Sheikh Akbar, A. Merhaba
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Abstract
Ceramic sensor based on TiO2-Al2O3 systems were thermally cycled in the temperature range of 21 degree(s)C to 685 degree(s)C for different number of cycles. Thermal wave imaging technique (TWI), a non-destructive and non-contact evaluation method was used to characterize the bonding of sensor films with the substrate. Based on the thermal wave signal amplitudes, an assessment of bond strength was made. The results indicate that samples with 700 degree(s)C heat treatment show the best bonding characteristics. Furthermore, with increasing number of thermal cycles, bonding quality turns out to decrease as damage occurs. Thermal wave imaging is a powerful NDE tool. Results from a number of material evaluation efforts indicate that the technique has great promise.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bin Feng, Golam Newaz, Gregory W. Auner, Sheikh Akbar, and A. Merhaba "Nondestructive evaluation of bonding characteristics of TiO2-Al2O3 gas sensor", Proc. SPIE 4703, Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems, (7 June 2002); https://doi.org/10.1117/12.469628
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KEYWORDS
Sensors

Thermography

Nondestructive evaluation

Gas sensors

Thin films

Actuators

Computing systems

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