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5 August 2002 Room temperature YBaCuO infrared detectors on a flexible substrate
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Infrared microbolometer thermal detectors have been fabricated on a flexible substrate, a polyimide that shows very similar characteristics to Kapton , when cured. The polyimide is spin-coated on a regular Si wafer with a release layer. Low temperature fabrication techniques are employed to minimize the thermal cycling of the polyimide substrate as well as to maintain compatibility with CMOS circuitry. Infrared microsensors on flexible substrates showed a Temperature Coefficient of Resistance (TCR=(1/R)(dR/dT)) of -3.03%, at room temperature. The microbolometers reached the responsivity and detectivity of 3.5x103 V/W and 1x107 cm.Hz1/2 /W, respectively, at 2.88 μA of current bias even though at this time no micromachining has been performed. Some devices were encapsulated between polyimide layers in order to provide protection and passivation. These bolometers demonstrated a responsivity and detectivity of 1.6x103 V/W and 4.9x106 cm.Hz1/2/W, respectively at 1 μA of current bias. This is the first attempt towards a smart skin that incorporates flexible microsensors on a cured polyimide-substrate.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zeynep Celik-Butler, Donald P. Butler, and Ali Yildiz "Room temperature YBaCuO infrared detectors on a flexible substrate", Proc. SPIE 4721, Infrared Detectors and Focal Plane Arrays VII, (5 August 2002);

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