29 May 2002 Intracavity fabrication of nanostructures on bulk materials
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Proceedings Volume 4748, ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures; (2002) https://doi.org/10.1117/12.468990
Event: XVII International Conference on Coherent and Nonlinear Optics (ICONO 2001), 2001, Minsk, Belarus
Abstract
The analytical and experimental investigations describing the intracavity processing of different solid-sate materials (Al, Cr, Ge, Si) are presented. New designs of the laser cavity were explored to facilitate the fabrication of structures composed of a system of equidistant parallel 250 nm-sized grooves and periodic micro-dots on massive samples of metals and semiconductors, as well as micro-holes in thin film metallic samples.
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Vladimir P. Osipov, Vladimir P. Osipov, Vasily V. Valyavko, Vasily V. Valyavko, } "Intracavity fabrication of nanostructures on bulk materials", Proc. SPIE 4748, ICONO 2001: Fundamental Aspects of Laser-Matter Interaction and Physics of Nanostructures, (29 May 2002); doi: 10.1117/12.468990; https://doi.org/10.1117/12.468990
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