30 May 2002 Microscopic imaging of semiconductor surfaces and interfaces
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Abstract
We propose and experimentally demonstrate two spectroscopic techniques for microscopic imaging of water stains on the surface of semiconductors and crystal structure of the surface layers.
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Vladislav V. Yakovlev, Katerina Mikhailichenko, Sergei V. Govorkov, "Microscopic imaging of semiconductor surfaces and interfaces", Proc. SPIE 4749, ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine, (30 May 2002); doi: 10.1117/12.468882; https://doi.org/10.1117/12.468882
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