30 May 2002 Microscopic imaging of semiconductor surfaces and interfaces
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Proceedings Volume 4749, ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine; (2002); doi: 10.1117/12.468882
Event: XVII International Conference on Coherent and Nonlinear Optics (ICONO 2001), 2001, Minsk, Belarus
Abstract
We propose and experimentally demonstrate two spectroscopic techniques for microscopic imaging of water stains on the surface of semiconductors and crystal structure of the surface layers.
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Vladislav V. Yakovlev, Katerina Mikhailichenko, Sergei V. Govorkov, "Microscopic imaging of semiconductor surfaces and interfaces", Proc. SPIE 4749, ICONO 2001: Novel Trends in Nonlinear Laser Spectroscopy and Optical Diagnostics and Lasers in Chemistry, Biophysics, and Biomedicine, (30 May 2002); doi: 10.1117/12.468882; https://doi.org/10.1117/12.468882
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KEYWORDS
Semiconducting wafers

Crystals

Luminescence

Anisotropy

Silicon

Confocal microscopy

Microscopes

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