1 April 2002 Thermal wave phase and amplitude measurements of thin metal films thickness
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Abstract
It is shown that for integrating control of thickness of uniform metal films along surface samples, an amplitude measuring is more promising in comparison with phase one.
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A. V. Reznikov, A. V. Reznikov, } "Thermal wave phase and amplitude measurements of thin metal films thickness", Proc. SPIE 4750, ICONO 2001: Quantum and Atomic Optics, High-Precision Measurements in Optics, and Optical Information Processing, Transmission, and Storage, (1 April 2002); doi: 10.1117/12.464471; https://doi.org/10.1117/12.464471
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