PROCEEDINGS VOLUME 4755
SYMPOSIUM ON DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002 | 19-19 MARCH 2002
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Editor(s): Bernard Courtois, Jean Michel Karam, Karen W. Markus, Bernd Michel, Tamal Mukherjee, James A. Walker
Editor Affiliations +
SYMPOSIUM ON DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002
19-19 March 2002
Cannes-Mandelieu, France
Joint Invited Papers
Olav Solgaard, Kyoungsik Yu, Uma Krishnamoorthy, Kebin Li, Jonathan Paul Heritage
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462796
Satchidananda Mishra, Michael Pecht, Douglas L. Goodman
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462807
Analysis, Tools, and Methods
Robert Sattler, Gerhard Wachutka
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462818
Andrey Ushakov, Irina Landman, Igor Balk
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462829
Marta Rencz, Vladimir Szekely, Andras Poppe
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462840
Sven Rehfuss, Christophe Gorecki, Claudia Marschner, Dagmar Peters, Rainer Laur
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462851
Jan Lienemann, Andreas Greiner, Jan G. Korvink
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462862
Lobna Kriaa, W. Youssef, Gabriela Nicolescu, Sergio O. Martinez, Steven Peter Levitan, Jose A. Martinez, Timothy P. Kurzweg, Ahmed A. Jerraya, Bernard Courtois
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462873
Design and Characterization
Zheng Cui, Zhan Zhao, Shanhong Xia
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462884
L. Martoglio, E. Richalot, O. Picon
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462797
Ihsan Hariadi, Hoc-Khiem Trieu, Holger Vogt
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462798
Bohuslav Palan, Kholdoun Torki, Bernard Courtois, Miroslav Husak
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462799
Wim Meeusen, Dominiek Reynaerts, Hendrik Van Brussel
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462800
Manufacturing Variations and Tuning
Sitaraman V. Iyer, Hasnain Lakdawala, Tamal Mukherjee, Gary K. Fedder
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462801
Flavien Delauche, Bachar Affour, Christian Dufaza
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462802
Olivier Billoint, Dimitri Galayko, Bernard Legrand, Andreas Kaiser
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462803
Joerg Muchow, Andre Kretschmann, Ralf Henn, Klaus Skrobanek, Stefan Finkbeiner, Hans Reiner Krauss
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462804
Methods, Tools, and Design Flows
Richard Rosing, C. Wang, R. W. Tucker, Andrew Richardson, B. De Masi
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462805
Giorgio Casinovi
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462806
Karim Liateni, Gabriel Thomas, Christophe Hui Bon Hoa, David Bensaude
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462808
L. Rufer, C. Domingues, Salvador Mir
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462809
Jiunn-Horng Lee, Hung-Chun Wu, Wei-Te Lee, Chih-Wei Cheng
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462810
Component Design
J. Hildenbrand, J. Wollenstein, E. Spiller, G. Kuhner, Harald Boettner, Gerald A. Urban, Jan G. Korvink
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462811
Dooyoung Hah, Hiroshi Toshiyoshi, Ming C. Wu
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462812
Guo Neng Lu, Gerard Sou, A. Aubert, G. Carrillo, A. El Mourabit
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462813
M. S. Mahmoud, Diaa Abdel-Maguid M. Khalil, M. T. El-Hagry, Mohammed A. L. Badr
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462814
Poster Papers: CAD, Design, and Test
Ingo Sieber, Horst Eggert, Karl-Heinz Suphan
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462815
Graeme A. McRobbie, Fraser Clark, Chris Tandy
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462816
Peter Schneider, Andre Schneider, J. Bastian, S. Reitz, Peter Schwarz
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462817
Dagmar Peters, Sven Rehfuss, Hilmar Bolte, Oliver Nuessen, Rainer Laur
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462819
Hilmar Bolte, Dagmar Peters, Oliver Nuessen, Rainer Laur
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462820
Sung Kie Youn, Byung Man Kwak, Jang-Hyuk Kwon, Su-Young Chang, Jae Sung Huh, Eugene Kim
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462821
M. C. Hsieh, Yean-Kuen Fang, M. S. Ju, Jyh-Jier Ho, S. F. Ting
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462822
Jiaping Yang, Jie Chai, Boon Baun Lim, Shixin Chen
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462823
Hsiharng Yang, WeiChung Chuang, Dong-Min Sue, Chengtang Pan, Yu Hsi Chao
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462824
Gerard Sou, Guo Neng Lu
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462825
Sam Young Bae, Ken J. Hayworth, Karl Y. Yee, Kirill Shcheglov, Dean V. Wiberg
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462826
Dirk Scheibner, Juergen Wibbeler, Jan Mehner, Birgit Braemer, Thomas Gessner, Wolfram Doetzel
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462827
Petr P. Maltsev
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462828
A. Wilde, Peter Schneider
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462830
Andrey Ushakov, Irina Landman, Igor Balk
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462831
Christophe Germer, Ulli Hansen, H.-J. Franke, Stephanus Buettgenbach
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462832
S. Reitz, J. Bastian, Joachim Haase, Peter Schneider, Peter Schwarz
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462833
Chun-Jung Chen, Wen-Pin Tai, Jenn-Dong Sun
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462834
Oliver Nuessen, Hilmar Bolte, Dagmar Peters, Rainer Laur, S. Halstenberg, Horst Eggert
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462835
Lijie Li, Deepak G. Uttamchandani
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462836
Firas Mohamed, Bachar Affour, Stephane Despreaux, B. Guillon, Patrick Giroud
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462837
David Moulinier, Philippe Nachtergaele, Marie-Pierre Brutails, Stephane Bergeon, Stephane Maza, Christophe Hui Bon Hoa
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462838
Valerio Annovazzi-Lodi, Sabina Merlo, Michele Norgia, Guido Spinola, Benedetto Vigna, Sarah Zerbini
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462839
Kaisa Nera, Ossi Hahtela, Sami Franssila, Ilkka Tittonen
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462841
Components for Communications Applications
Hsiharng Yang, Chengtang Pan, S.C. Shen
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462842
Jean Louis Leclercq, Philippe Regreny, Pierre Viktorovitch, A. Bakouboula, Taha Benyattou, Isabelle Sagnes, G. Saint-Girons, C. Meriadec, Alexandru Z. Mereuta, et al.
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462843
Dan Zhou, K. Sun, Michel Garrigues, Jean Louis Leclercq, Philippe Regreny, Jiangde Peng, Pierre Viktorovitch
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462844
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462845
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462846
Xu Ming Zhang, Ai Qun Liu, Chao Lu, Ding Yuan Tang, Fang Wang, Zishun Liu, C. Lu
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462847
Packaging and Assembly
P. Boyle, Richard R. A. Syms, David F. Moore
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462848
Erik Jung, M. Wiemer, Volker Grosser, Karlheinz Bock, Juergen Wolf
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462849
Juergen Auersperg, Rainer Dudek, Bernd Michel
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462850
GuoQuan Lu, J. Calata, S. Wen, Sanghamitra B. Dutta, Yun Zheng, C. Stahl, Peter K. Shu
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462852
Erik Beckert, Matthias Mohaupt, Gerd Harnisch, Ramona Eberhardt
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462853
Devices and Components
Zhiping Wang, Xue Chuan Shan, Z. P. Wang, Siak-Piang Lim, K. H. Lee, Wilfried Noell, Nico F. de Rooij
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462854
N. Sabate, Isabel Gracia, Carles Cane, J. Berganzo, J. Puicorbe, Juan Ramon Morante
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462855
Thomas George
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462856
F. Parrain, Benoit Charlot, Nicolas Galy, Bernard Courtois
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462857
Characterization and Reliability
Marcus Sonner, Peter Sprafke, Bernd Michel
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462858
V. J. Logeeswaran, Francis E.H. Tay, M. L. Chan, Fook Siong Chau, Yung C. Liang
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462859
Takashi Usuda, Skandar Basrour, H. Majjad, Jean-Rene Coudevylle, Michel de Labachelerie
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462860
Vincent Agache, Bernard Legrand, Dominique Collard, Lionel Buchaillot
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462861
Matthias Petzold, Dieter Katzer, M. Wiemer, Joerg Bagdahn
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462863
Xavier Lafontan, Christophe Le Touze, Beatrice Wenk, Inna Kolesnik, Francis Pressecq, Guy Perez, Jean-Marc Nicot, Muriel Dardalhon, Sebastien Rigo
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462864
Integrated Process and Manufacturing
J. Laconte, C. Dupont, A. Akheyar, J. P. Raskin, D. Flandre
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462865
Andre Perret, Arno Hoogerwerf, Philippe Niedermann, Xiao-Ming Tang, Sylvain Jeanneret, Pierre-Andre Clerc, Nico F. de Rooij, Pierre Gygax
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462866
Anke Sanz-Velasco, Henrik Roedjegard, Gert I. Andersson
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462867
Sidharth Dalmia, Seock Hee Lee, Swapan Bhattacharya, Farrokh Ayazi, Madhu Swaminathan
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462868
Mathias Heckele, Frank Anna
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462869
Posters on Microfabrication, Integration and Packaging
Fritz Herbert, Lutz Dorn
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462870
Harold S. Gross, Dinh Ton, M. Gmuer, David A. Crewe
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462871
Wonseo Choi, Joonyeop Lee, Seongsu Moon, Seonho Seok, KukJin Chun
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462872
Olivier Millet, Dominique Collard, Lionel Buchaillot
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462874
Sebastien Rigo, Jean Michel Desmarres, Talal Masri, Jacques Alain Petit
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462875
Brandon Olson, Kuan H. Chen
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462876
M. L. Chan, Francis E.H. Tay, V. J. Logeeswaran, Kaiyang Zeng, Lu Shen, Fook Siong Chau
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462877
Dietmar Vogel, Astrid Gollhardt, Bernd Michel
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462878
Qinjun Peng, Yongkang Guo, Bo Chen, Jinglei Du, Jinshan Xiang, Zheng Cui
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462879
Yixiao Zhang, Jinglei Du, Jingguo Yang, Yangsu Zeng, Yongkang Guo, Zheng Cui, Jun Yao
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462880
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462881
Gou-Jen Wang, Shuh-Yi Wang, Chi-Hsian Chin
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462882
Angeliki Tserepi, C. Tsamis, Evangelos Gogolides, A. G. Nassiopoulou
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462883
A. B. Yu, Ai Qun Liu, Chunsheng Yang, Guifu Ding
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462885
Qingxin Zhang, Jing Li, Yu Bo Miao, Ai Qun Liu
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462886
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462887
Vladislav Djakov, Syed Ejazu Huq
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462888
Vladimir Zubzov, Valentin V. Baranov, Victor Emelyanov
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462889
M. Tang, J.-M. Huang, Ai Qun Liu
Proceedings Volume Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (2002) https://doi.org/10.1117/12.462890
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