Application of XML to geometric modeling of MEMS

Jiunn-Horng Lee; Hung-Chun Wu; Wei-Te Lee; Chih-Wei Cheng

doi:10.1117/12.462810

19 April 2002 Application of XML to geometric modeling of MEMS

Jiunn-Horng Lee, Hung-Chun Wu, Wei-Te Lee, Chih-Wei Cheng

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462810
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

The necessary information for geometric modeling of MEMS consists of a mask layout file and a process definition file. CIF and GDSII are commonly accepted formats for the mask layout file. However, there are no standard ways to express the process definition file. In this paper, we propose an XML (Extensible Markup Language) data model to describe the process definition file for geometric modeling of surface-micro-machined MEMS. This model has been incorporated in our CAD system. The results of implementation show that the XML approach not only facilitates the development of applications but also helps the exchange of information.

Citation Download Citation

Jiunn-Horng Lee, Hung-Chun Wu, Wei-Te Lee, and Chih-Wei Cheng "Application of XML to geometric modeling of MEMS", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462810

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