Application of a computer-supported method for design optimization of micro-optical systems on an IR gas sensor

Ingo Sieber; Horst Eggert; Karl-Heinz Suphan

doi:10.1117/12.462815

19 April 2002 Application of a computer-supported method for design optimization of micro-optical systems on an IR gas sensor

Ingo Sieber, Horst Eggert, Karl-Heinz Suphan

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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462815
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Manufacturing test structures of microsensors and microactuators is very expensive in terms of time and materials. In a conventional design process, this limits the number of design variants to be considered. For this reason, computer supported design techniques are becoming more and more important in microsystems technologies. The modular structure of hybrid systems requires single components to be manufactured in isolation and later combined into one total system. Combining single components into one overall system is bound to be subject to certain tolerances. The concept presented in this paper is the computer-aided design of a modular system rugged enough to be employed in mass fabrication. In mass fabrication, it is not the ideal arrangement of individual components which results in the most effective system. Instead, tolerances in position individual optical elements need to be taken into account already in modeling. Furthermore, environmental influences like e.g. variations of the temperature can have an impact on the performance of the optical function module.

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Ingo Sieber, Horst Eggert, and Karl-Heinz Suphan "Application of a computer-supported method for design optimization of micro-optical systems on an IR gas sensor", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462815

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KEYWORDS

Sensors

Gas sensors

Absorption

Microsystems

Optimization (mathematics)

Infrared sensors

Systems modeling

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