Digital compensation technique for the improvement of the comb drive actuator transient response

M. S. Mahmoud; Diaa Abdel-Maguid M. Khalil; M. T. El-Hagry; Mohammed A. L. Badr

doi:10.1117/12.462814

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19 April 2002 Digital compensation technique for the improvement of the comb drive actuator transient response

M. S. Mahmoud, Diaa Abdel-Maguid M. Khalil, M. T. El-Hagry, Mohammed A. L. Badr

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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462814
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

In this work, we propose a new technique to improve the transient response of the comb drive actuator using a digital compensation technique. This technique is mainly based on the use of a specific digital pulse train that satisfies the equal area criterion on the force displacement diagram of the actuator. Applying this technique to a specific actuator design, we show that it increases the forward displacement without sticking, reduces the overshoot, and improves the speed of response.

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M. S. Mahmoud, Diaa Abdel-Maguid M. Khalil, M. T. El-Hagry, and Mohammed A. L. Badr "Digital compensation technique for the improvement of the comb drive actuator transient response", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462814

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