19 April 2002 Fabrication of optical switch arrays with auto-aligning fibers and latching micromirrors
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462842
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
This paper presents an innovative device for self-parking in a v-groove and a self-latching vertical mirror on the suspension diaphragm using the out of plane fiber-optical switch array technique. The self-parking offers integrating the optical fiber and mirror within the same optical switch. The self-latching vertical mirror is supported on the suspension diaphragm by four cantilever beams. The theoretical analysis includes a dynamic simulation using the ANSYS software and corner compensation using the IntelliCAD software. The fabrication process consists of wet etching mircromachining, lithography, and excimer laser ablation. This proposed process is simpler than those proposed in other works. An electrostatic driving voltage is used to operate the optical switch. The mirror is made of a photoresist coating with gold film as the switching element. The reflectivity of the gold film mirror is higher than 85% using a wavelength of 1310nm. The micro-optical switch has a maximum of displacement of 48 micrometers and the switching time is below 0.4 ms with a driving voltage of 100 VDC.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hsiharng Yang, Hsiharng Yang, Chengtang Pan, Chengtang Pan, S.C. Shen, S.C. Shen, "Fabrication of optical switch arrays with auto-aligning fibers and latching micromirrors", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462842; https://doi.org/10.1117/12.462842
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