19 April 2002 Fully CMOS-compatible low-power microheater
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462865
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
An original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20.000 degree(s)C/W) and very low power consumption (20 mW for heating at 400 degree(s)C). Moreover, the use of CMOS-IC compatible TMAH-based bulk-micromachining techniques will allow easy and low cost gas sensor integration.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Laconte, J. Laconte, C. Dupont, C. Dupont, A. Akheyar, A. Akheyar, J. P. Raskin, J. P. Raskin, D. Flandre, D. Flandre, } "Fully CMOS-compatible low-power microheater", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462865; https://doi.org/10.1117/12.462865
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