Influence of process variation on the functionality of a high-pressure sensor

Joerg Muchow; Andre Kretschmann; Ralf Henn; Klaus Skrobanek; Stefan Finkbeiner; Hans Reiner Krauss

doi:10.1117/12.462804

19 April 2002 Influence of process variation on the functionality of a high-pressure sensor

Joerg Muchow, Andre Kretschmann, Ralf Henn, Klaus Skrobanek, Stefan Finkbeiner, Hans Reiner Krauss

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462804
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

A sensor designer has to keep in mind a couple of things developing a new product. These are performance, reliability and last but not least cost. Cost is mainly a function of yield. To be successful on the market, it is therefore necessary to predict yield for a new design, based on its process steps. This can be done only by modeling a sensor based on process parameters as input to the models. How to realize this, will be shown for the design of a high pressure sensor.

Citation Download Citation

Joerg Muchow, Andre Kretschmann, Ralf Henn, Klaus Skrobanek, Stefan Finkbeiner, and Hans Reiner Krauss "Influence of process variation on the functionality of a high-pressure sensor", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462804

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