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19 April 2002 Influence of process variation on the functionality of a high-pressure sensor
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462804
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
A sensor designer has to keep in mind a couple of things developing a new product. These are performance, reliability and last but not least cost. Cost is mainly a function of yield. To be successful on the market, it is therefore necessary to predict yield for a new design, based on its process steps. This can be done only by modeling a sensor based on process parameters as input to the models. How to realize this, will be shown for the design of a high pressure sensor.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joerg Muchow, Andre Kretschmann, Ralf Henn, Klaus Skrobanek, Stefan Finkbeiner, and Hans Reiner Krauss "Influence of process variation on the functionality of a high-pressure sensor", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462804
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