Large-scale metal MEMS mirror arrays with integrated electronics

Thomas G. Bifano; Paul A. Bierden; Steven Cornelissen; Clara E. Dimas; Hocheol Lee; Michele Miller; Julie A. Perreault

doi:10.1117/12.462845

19 April 2002 Large-scale metal MEMS mirror arrays with integrated electronics

Thomas G. Bifano, Paul A. Bierden, Steven Cornelissen, Clara E. Dimas, Hocheol Lee, Michele Miller, Julie A. Perreault

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462845
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Design, microfabrication, and integration of a micromachined spatial light modulator ((mu) SLM) device are described. A large array of electrostatically actuated, piston-motion MEMS mirror segments make up the optical surface of the (mu) SLM. Each mirror segment is capable of altering the phase of reflected light by up to one wavelength for infrared illumination ((lambda) equals 1.5 micrometers ), with 4-bit resolution. The device is directly integrated with complementary metal- oxide semiconductor (CMOS) electronics, for control of spatial optical wavefront. Integration with electronics is achieved through direct fabrication of MEMS actuators and mirror structures on planarized foundry-type CMOS electronics. Technical approaches to two significant challenges associated with manufacturing the (mu) SLM is discussed: integration of the MEMS array with the electronic driver array and production of optical-quality mirror elements using a metal-polymer surface micromachining process.

Citation Download Citation

Thomas G. Bifano, Paul A. Bierden, Steven Cornelissen, Clara E. Dimas, Hocheol Lee, Michele Miller, and Julie A. Perreault "Large-scale metal MEMS mirror arrays with integrated electronics", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462845

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