Paper
19 April 2002 MEMS/NEMS development for space applications at NASA/JPL
Thomas George
Author Affiliations +
Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462856
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
This paper presents an overview of the current technology development activities of the MEMS Technology Group at JPL> The group, in collaboration with other research groups at JPL and outside institutions, pursues the development of a wide range of MEMS/NEMS technologies that are primarily applicable to NASA's needs in the area of robotic planetary exploration. The broad classes of technologies being developed include inertial guidance devices, micro- propulsion devices, and adaptive optics for telescope applications, micro-instruments and nano-mechanical resonator devices. End-to-end prototype development of these MEMS/NEMS technologies is conducted at JPL's state-of-the- art Microdevices Laboratory. The group is also pursuing the establishment of a rapid, space-testing program in collaboration with the Aerospace Corporation, in an effort to overcome the traditional barriers to the insertion of new technologies into space missions.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas George "MEMS/NEMS development for space applications at NASA/JPL", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462856
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Cited by 9 scholarly publications.
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KEYWORDS
Microelectromechanical systems

Silicon

Space operations

Gyroscopes

Sensors

Resonators

Aerospace engineering

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