19 April 2002 Monolithic tunable InP-based vertical-cavity surface-emitting laser
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002); doi: 10.1117/12.462843
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
We report on the combination of the well established 1.55 micrometers monolithic VCSEL's concept with the Micro-Opto-Electro- Mechanical System (MOEMS) technological breakthrough in order to develop a novel tunable laser device for wavelength division multiplexing optical systems. Technological issures are presented for fabricating surface micromachined InP-based tunable VCSELs.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean Louis Leclercq, Philippe Regreny, Pierre Viktorovitch, A. Bakouboula, Taha Benyattou, Isabelle Sagnes, G. Saint-Girons, C. Meriadec, Alexandru Z. Mereuta, S. Bouchoule, Antonina Plais, Joel Jacquet, "Monolithic tunable InP-based vertical-cavity surface-emitting laser", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462843; https://doi.org/10.1117/12.462843
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KEYWORDS
Vertical cavity surface emitting lasers

Tunable lasers

Microopto electromechanical systems

Quantum wells

Tunable filters

Ion implantation

Optical pumping

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