19 April 2002 Monolithic tunable InP-based vertical-cavity surface-emitting laser
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462843
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
We report on the combination of the well established 1.55 micrometers monolithic VCSEL's concept with the Micro-Opto-Electro- Mechanical System (MOEMS) technological breakthrough in order to develop a novel tunable laser device for wavelength division multiplexing optical systems. Technological issures are presented for fabricating surface micromachined InP-based tunable VCSELs.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean Louis Leclercq, Jean Louis Leclercq, Philippe Regreny, Philippe Regreny, Pierre Viktorovitch, Pierre Viktorovitch, A. Bakouboula, A. Bakouboula, Taha Benyattou, Taha Benyattou, Isabelle Sagnes, Isabelle Sagnes, G. Saint-Girons, G. Saint-Girons, C. Meriadec, C. Meriadec, Alexandru Z. Mereuta, Alexandru Z. Mereuta, S. Bouchoule, S. Bouchoule, Antonina Plais, Antonina Plais, Joel Jacquet, Joel Jacquet, } "Monolithic tunable InP-based vertical-cavity surface-emitting laser", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462843; https://doi.org/10.1117/12.462843
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