19 April 2002 New approach for 3D capacitance extractions for complex structures with conformal dielectrics
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462829
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
This paper describes a new approach for 3-D capacitance extraction using the boundary element method. The new formulation described in this paper improves condition number of the linear system to be solved and reduces the number of unknowns in the system. Implementation of the described method, in conjunction with an acceleration algorithm, will significantly reduce the computational time and memory required for the simulation of electrostatically actuated MEMS devices.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andrey Ushakov, Andrey Ushakov, Irina Landman, Irina Landman, Igor Balk, Igor Balk, } "New approach for 3D capacitance extractions for complex structures with conformal dielectrics", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462829; https://doi.org/10.1117/12.462829
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