19 April 2002 Optimization of the planar pellistor using finite element analysis
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462816
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
The planar pellistor is a thin film microsensor used for the detection of inflammable gases. In its simplest, it consists of a metallic meander structure that serves both as a heater for the catalyst and as a temperature sensor. For low power operation thermal insulation between the sensor and the substrate is vital and is achieved by a thin silicon nitride membrane. The optimization of such a structure in terms of the sensor's dimensions is discussed.
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Graeme A. McRobbie, Graeme A. McRobbie, Fraser Clark, Fraser Clark, Chris Tandy, Chris Tandy, } "Optimization of the planar pellistor using finite element analysis", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462816; https://doi.org/10.1117/12.462816
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