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19 April 2002 Perspectives of microsystem engineering developments in Russia
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462828
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
Modem status of technique of new generation and "critical" technologies in a number of the most developed countries is characterized by Microsystem technology dynamic development from the beginning of the 90-th years ("microsystems technology " - MST) that determined the creation of a new scientific and technical direction - "microsystem engineering " ("mirosystems engineering " MSE).
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Petr P. Maltsev "Perspectives of microsystem engineering developments in Russia", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462828
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