19 April 2002 Study of adhesive forces on a silicon nanotip by atomic force microscope in contact mode
Author Affiliations +
Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462861
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
Atomic Force Microscope operating in contact mode is used in this paper for probing the spatial distribution of adhesive forces versus the topography of a silicon nanotip. This nanotip consists in an ultra sha4rp silicon tip with radius less than 15 nm fabricated using a combination of high- resolution electron beam lithography and plasma dry etching. The amplitude of the forces is determined from force versus distance curve measurements. Hence, by determining the contact point and the pull-off force from the force curves, the surface topography and the adhesive forces are simultaneously obtained at various locations on the surface. This paper reports both measurements and the modeling of adhesive forces versus the contact point on the nanotip. As the nanotip is sharper and has got a smaller aperture angle than the employed Atomic Force Microscope tip, the measurements are focused on the nanotip apex.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vincent Agache, Vincent Agache, Bernard Legrand, Bernard Legrand, Dominique Collard, Dominique Collard, Lionel Buchaillot, Lionel Buchaillot, } "Study of adhesive forces on a silicon nanotip by atomic force microscope in contact mode", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462861; https://doi.org/10.1117/12.462861
PROCEEDINGS
12 PAGES


SHARE
Back to Top