19 April 2002 Surface tension defects in microfluidic self-alignment
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462862
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
Self-alignment in the fluidic phase is an alternative technique to conventional pick-and-place assembly, providing cost-effective, precise assembly of millions of microparts. For accurate alignment, the control of unwanted surface defects lowering alignment precision. Local minima are investigated and the modulation of the energy curve is simulated. Furthermore, hytsteresis effects are studied. The simulation results allow predictions for the modeling of the fluidic surface tension driven self alignment and thus provide conditions for the robustness of the fabrication process.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan Lienemann, Andreas Greiner, Jan G. Korvink, "Surface tension defects in microfluidic self-alignment", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462862; https://doi.org/10.1117/12.462862
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