Surface tension defects in microfluidic self-alignment

Jan Lienemann; Andreas Greiner; Jan G. Korvink

doi:10.1117/12.462862

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19 April 2002 Surface tension defects in microfluidic self-alignment

Jan Lienemann; Andreas Greiner; Jan G. Korvink

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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462862
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Self-alignment in the fluidic phase is an alternative technique to conventional pick-and-place assembly, providing cost-effective, precise assembly of millions of microparts. For accurate alignment, the control of unwanted surface defects lowering alignment precision. Local minima are investigated and the modulation of the energy curve is simulated. Furthermore, hytsteresis effects are studied. The simulation results allow predictions for the modeling of the fluidic surface tension driven self alignment and thus provide conditions for the robustness of the fabrication process.

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Jan Lienemann, Andreas Greiner, and Jan G. Korvink "Surface tension defects in microfluidic self-alignment", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462862