19 April 2002 System-level simulation of acoustic devices
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Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462830
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France
Abstract
The Transmission Line Matrix method (TLM) provides an easy to use and fast scheme to calculate acoustic fields. Thus it is possible to couple this method to system simulation tools in order to investigate the behavior of acoustic systems and the interaction between acoustic domain and control electronics at an early design stage. These investigations are very important in MEMS design, especially for ultrasonic devices, transducers and SAW filters. As a proof of concept an active noise control system was designed and the performance was simulated in a 2D acoustic environment. The results clearly show the feasibility of acoustic field calculations along with system level simulations of electronic devices and transducers. Using this scheme, acoustic devices may be simulated and optimized under realistic acoustic conditions.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Wilde, A. Wilde, Peter Schneider, Peter Schneider, } "System-level simulation of acoustic devices", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462830; https://doi.org/10.1117/12.462830
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