Excimer laser polymer ablation: the first twenty years

Peter E. Dyer

doi:10.1117/12.482126

13 September 2002 Excimer laser polymer ablation: the first 20 years

Peter E. Dyer

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482126
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

Excimer laser polymer ablation has been an active field of research and development for some twenty years now. We briefly review basic mechanistic aspects of the interaction, practical considerations related to polymer processing by ablation and applications in micromachining.

Citation Download Citation

Peter E. Dyer "Excimer laser polymer ablation: the first 20 years", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482126

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