13 September 2002 Excimer laser polymer ablation: the first 20 years
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Proceedings Volume 4760, High-Power Laser Ablation IV; (2002); doi: 10.1117/12.482126
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States
Abstract
Excimer laser polymer ablation has been an active field of research and development for some twenty years now. We briefly review basic mechanistic aspects of the interaction, practical considerations related to polymer processing by ablation and applications in micromachining.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter E. Dyer, "Excimer laser polymer ablation: the first 20 years", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482126; https://doi.org/10.1117/12.482126
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