Interaction of VUV F2 laser radiation with glasses

Peter E. Dyer; Saher M. Maswadi; Christopher D. Walton

doi:10.1117/12.482072

13 September 2002 Interaction of VUV F₂ laser radiation with glasses

Peter E. Dyer, Saher M. Maswadi, Christopher D. Walton

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482072
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

The 157nm F₂ laser wavelength is strongly absorbed by glasses, even those with high silica content, making it potentially well suited for machining these materials by ablation. This is of interest for fabricating micro-optics and micro-devices in glass, provided crack-free surfaces with minimal laser-induced stress and surface roughness can be produced. Experimental studies are reported on the ablation threshold, ablation rate and surface quality of N-BK7 and soda lime glass for exposure with the VUV F₂ laser. Optical probe techniques and etching are employed to determine the ablation threshold and removal rate and scanning electron microscopy to assess the surface quality of the glass following laser exposure. The interaction is discussed within the framework of a thermal vaporization model and the surface thermal loading is used to make a preliminary assessment of resolution attainable in micro-feature definition.

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Peter E. Dyer, Saher M. Maswadi, and Christopher D. Walton "Interaction of VUV F₂ laser radiation with glasses", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482072

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