Paper
13 September 2002 KrF and XeF lasers pumped by a generator with inductive energy storage
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Abstract
Development of long-pulse discharge XeF- and KrF-lasers pumped by a generator with an inductive energy storage and semiconductor-opening switch is reported. It is shown that use of inductive storage element allows significantly improve discharge stability and expand laser pulse duration. Pulse duration (FWHM) of 60 ns was obtained both in Ne-Xe- NF3 and Nr-Kr-F2 gas mixtures. Laser specific output of 2,5 J/l and intrinsic efficiency over 1% have been obtained for KrF laser.
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Victor F. Tarasenko, Evgenii H. Baksht, and Alexei N. Panchenko "KrF and XeF lasers pumped by a generator with inductive energy storage", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482130
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KEYWORDS
Capacitors

Diodes

Pulsed laser operation

Semiconductors

Inductance

Switches

Laser stabilization

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