13 September 2002 Micrograting formation with femtosecond ultraviolet laser on optical materials
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Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482057
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States
The ability of UV femtosecond laser pulse to fabricate the fine-pitched microgratings on fused silica or ZnO surfaces has been demonstrated through a two-beam laser interference technique. A pump and probe method has been developed to find the time coincidence of the two UV pulses through a laser-induced optical Kerr effect or transient transmission change. The UV pulses achieve to narrow the grating pitches as small as 290nm. The establishment of the technique provides a novel opportunity for the fabrication of periodic nanoscale structures in various materials.
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Hayato Kamioka, Kenichi Kawamura, Taisuke Miura, Masahiro Hirano, Hideo Hosono, "Micrograting formation with femtosecond ultraviolet laser on optical materials", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); doi: 10.1117/12.482057; https://doi.org/10.1117/12.482057

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