Paper
13 September 2002 Perspectives of laser processing and chemistry
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Abstract
Laser-induced material processing is reviewed with special emphasis on recent achievements mainly obtained by the Linz group. Among those are investigations using optical fiber tips for nanoscale photophysical etching, laser-induced ablation using self-assembled microspheres, the pulse-laser deposition of thin films of high-temperature superconductors (HTS) and polytetrafluoroethylene (PTFE), and the modification and cleaning of surfaces.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dieter Baeuerle "Perspectives of laser processing and chemistry", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482081
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KEYWORDS
Laser processing

Thin films

Laser ablation

Chemical lasers

Etching

Silicon

Chemistry

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