30 July 2002 Kumakhov optics use in reflectometry
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Proceedings Volume 4765, International Conference on X-ray and Neutron Capillary Optics; (2002) https://doi.org/10.1117/12.489757
Event: International Conference on X-ray and Neutron Capillary Optics, 2001, Zvenigorod, Russian Federation
Abstract
An x-ray reflectometer has been developed based on Kumakhov's optics for roughness contorl fo polished surfaces and thin-film analysis for microelectronics applications. The half-lens used enables production of spatially collimated quasi-parallel x-ray required for the method, considerable decrease of the device's dimensions and x-ray power compared to existing models. The ability of Kumakhov's half-lenses to raise x-ray quanta density makes it possible to raise significantly the reflectometer's luminosity and reflectivity while reducing hte background.
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Nariman S. Ibraimov, Nariman S. Ibraimov, Anatoly V. Mozhayev, Anatoly V. Mozhayev, Ekaterina V. Likhushina, Ekaterina V. Likhushina, Oleg V. Mikhin, Oleg V. Mikhin, } "Kumakhov optics use in reflectometry", Proc. SPIE 4765, International Conference on X-ray and Neutron Capillary Optics, (30 July 2002); doi: 10.1117/12.489757; https://doi.org/10.1117/12.489757
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