Double-detector-array 3D profile inspection system

Chongxiang Li; Zhong Ping Fang; Anand Krishna Asundi

doi:10.1117/12.482184

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4 September 2002 Double-detector-array 3D profile inspection system

Chongxiang Li, Zhong Ping Fang, Anand Krishna Asundi

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Proceedings Volume 4768, Novel Optical Systems Design and Optimization V; (2002) https://doi.org/10.1117/12.482184
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

3-D profile confocal optical microscopy is a newly developed 3-D profile metrology and has widely applied in many kinds of 3-D shape inspection fields. Present 3-D shape measurement system used in confocal optical microscopy is single point measurement. Point by point detection to finish a 3-D profile inspection is considered a time consuming method and isn't suitable for large area measurement especially for high resolution measurement. This paper elaborated on a fiber-array confocal 3-D imaging system to improve measuring speed. In confocal measurement system, light source acts an important effect on system accuracy and repeatability. Light source fluctuation can cause a large error for high resolution 3-D shape measurement. This paper presents a novel system construction to solve the problem of light source fluctuation. The system design is compact and the construction is reasonable.

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Chongxiang Li, Zhong Ping Fang, and Anand Krishna Asundi "Double-detector-array 3D profile inspection system", Proc. SPIE 4768, Novel Optical Systems Design and Optimization V, (4 September 2002); https://doi.org/10.1117/12.482184

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