9 September 2002 Linear actuator system with 1-Å closed-loop control resolution and 50-mm travel range
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Abstract
We have designed and tested a novel linear actuator system with 1-angstrom closed-loop control resolution and 50-mm travel range. There are two major ultraprecision motion control techniques that have been applied to this actuator: A novel laser Doppler encoder system with multiple-reflection Optics. A specially designed high-stiffness weak-link mechanism with stacked thin metal sheets having sub-Angstrom driving sensitivity with excellent stability. In this paper, we present the system design and test results of this linear actuator. Applications of this new actuator system are also discussed. -Å
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Deming Shu, Deming Shu, Yufeng Han, Yufeng Han, Thomas S. Toellner, Thomas S. Toellner, Esen E. Alp, Esen E. Alp, } "Linear actuator system with 1-Å closed-loop control resolution and 50-mm travel range", Proc. SPIE 4771, Optomechanical Design and Engineering 2002, (9 September 2002); doi: 10.1117/12.482148; https://doi.org/10.1117/12.482148
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