11 September 2002 Contamination scatter functions for stray-light analysis
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Abstract
The 1992 work by Paul Spyak and William Wolfe correlating particulate contamination scatter with the predictions of Mie scatter theory has been extended and applied to the analysis of optical systems. Spyak & Wolfe's BRDF results, as applied to Mil-Spec 1246B particle distribution have been often misunderstood and misapplied. This paper provides the application of MIE theory to the modeling of scatter from particulate contaminated optics based on the Mil-Spec 1246B particle distribution and particle distributions more commonly seen in cleanroom fallout.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael G. Dittman, "Contamination scatter functions for stray-light analysis", Proc. SPIE 4774, Optical System Contamination: Effects, Measurements, and Control VII, (11 September 2002); doi: 10.1117/12.481666; https://doi.org/10.1117/12.481666
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