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26 November 2002 Synthesis ZnS:Sm thin films from volatile complex compounds
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Abstract
Deposition and characterization of ZnS, Sm2S3 and ZnS:Sm films are described. The films have been prepared by chemical vapor deposition using new volatile complex compounds, dithiocarbamates of Zn and Sm, as precursors. Characterization includes X-ray diffraction, chemical analysis of the film composition, ellipsometry and spectrophotometry. It has been shown that at relatively low temperatures (about 380 °C) monophase crystalline Sm2S3 films can be fabricated. Doping of ZnS by Sm with dopant concentration up to 2 at. % has been achieved. Effects of Sm doping on structural and optical properties of the film are presented.
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Elena Nikolaevna Ivanova, Yu. A. Kovalevskaya, and Valentin G. Bessreguenev "Synthesis ZnS:Sm thin films from volatile complex compounds", Proc. SPIE 4776, Solid State Lighting II, (26 November 2002); https://doi.org/10.1117/12.452564
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