20 June 2002 Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate
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Abstract
Wavelength scanning interferometry allows the simultaneous measurement of the surface profile and the optical thickness variation of a parallel plate. However, it is necessary to evaluate the modulation frequencies of the signal and noise which depend on the optical thickness and dispersion of the test plate. New nineteen-sample, wavelength scanning algorithms allow variation in these parameters and give a measurement resolution of 1-2 nanometers rms. Measurement of a BK7 near-parallel plate of 250 mm diameter and 25 mm thickness was demonstrated in a Fizeau interferometer.
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Kenichi Hibino, Kenichi Hibino, Bozenko F. Oreb, Bozenko F. Oreb, Philip S. Fairman, Philip S. Fairman, "Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); doi: 10.1117/12.472221; https://doi.org/10.1117/12.472221
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