Novel heterometer for measuring surface roughness

Zhaoxia Wu; Rui Ren; Zhiquan Li

doi:10.1117/12.472243

20 June 2002 Novel heterometer for measuring surface roughness

Zhaoxia Wu, Rui Ren, Zhiquan Li

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472243
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

The supersmooth surface roughness measurement is becoming more and more important with the development of the processing technique. This paper studies an on-line measurement system of the supersmooth surface roughness using optical heterodyne method. The simple structure and strong practicability of this system are researched. The experimental results show that this system has the feature of the good stability and high measured accuracy.

Citation Download Citation

Zhaoxia Wu, Rui Ren, and Zhiquan Li "Novel heterometer for measuring surface roughness", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472243

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